Title :
Helium Microprobe Analysis of Semiconductor Materials
Author :
McCallum, C. ; McKenzie, C.D. ; Williams, J.S.
Author_Institution :
School of Physics, University of Melbourne, Parkville 3052, Australia
fDate :
4/1/1983 12:00:00 AM
Abstract :
The Melbourne University nuclear microprobe is described. Recent improvements have enabled beam spot sizes of 1 ¿m to be obtained. Some applications of the probe to the analysis of semiconductor materials are discussed, in particular the use and map disp, lay of channeling over microscopic areas.
Keywords :
Apertures; Coils; Helium; Lenses; Microscopy; Particle beams; Physics; Semiconductor materials; X-ray detection; X-ray detectors;
Journal_Title :
Nuclear Science, IEEE Transactions on
DOI :
10.1109/TNS.1983.4332495
