• DocumentCode
    865352
  • Title

    Nickel electroplated widely tunable micromachined capacitor

  • Author

    Gallant, A.J. ; Wood, D.

  • Author_Institution
    Sch. of Eng., Durham Univ., UK
  • Volume
    38
  • Issue
    22
  • fYear
    2002
  • fDate
    10/24/2002 12:00:00 AM
  • Firstpage
    1392
  • Lastpage
    1393
  • Abstract
    Nickel electroplating is used to fabricate a widely tunable micromachined capacitor. From an initial capacitance of 0.7 pF, the device has a tuning ratio of 5.1:1 including parasitics: this is better than twice any previously reported figure for such devices. A process flow is presented which includes electrode surface roughening for stiction avoidance.
  • Keywords
    capacitance; capacitors; electroplated coatings; nickel; tuning; 0.7 pF; Ni; Ni electroplating; capacitance; electrode surface roughening; process flow; stiction avoidance; tuning ratio; widely tunable micromachined capacitor;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:20020910
  • Filename
    1047119
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=865352