Miniaturizable Si-based light intensity Modulator for integrated sensing applications

Author

Sciuto, Antonella ; Libertino, Sebania

Author_Institution

CNR-IMM, Catania

Volume

24

Issue

3

fYear

2006

fDate

3/1/2006 12:00:00 AM

Firstpage

1403

Lastpage

1408

Abstract

A Si-based light modulator working in the near infrared at frequencies up to 300 kHz is proposed. The device proposed is a bipolar mode field effect transistor (BMFET) integrated in an Si rib waveguide. The operation principle is the light dispersion/absorption by a plasma of free carriers that can be moved in or out of the optical path. It works as a pure amplitude light modulator; hence, it can be shrunk. Its small dimensions, only 100 mum in length and less than 50 mum in width in the proposed version, make it suitable for monolithic integration for applications where the major constraints are the device dimensions. As an example, the device application to an integrated gas sensing or chemical absorption spectroscopy system is also described

Keywords

elemental semiconductors; field effect transistors; gas sensors; integrated optics; integrated optoelectronics; micro-optics; microsensors; monolithic integrated circuits; optical dispersion; optical modulation; optical sensors; optical waveguides; plasma light propagation; rib waveguides; silicon; spectrochemical analysis; 100 mum; 300 kHz; 50 mum; Si; Si rib waveguide; Si-based light modulator; bipolar mode field effect transistor; chemical absorption spectroscopy; integrated gas sensing; integrated sensing application; light intensity modulator; miniaturizable modulator; monolithic integration; plasma light absorption; plasma light dispersion; pure amplitude light modulator; Electromagnetic wave absorption; FETs; Frequency; Intensity modulation; Optical modulation; Optical sensors; Optical waveguides; Plasma applications; Plasma devices; Plasma waves; BMFET; Si; integrated sensing systems; light intensity modulator; monolithic integration; optoelectronic; waveguide;

fLanguage

English

Journal_Title

Lightwave Technology, Journal of

Publisher

ieee

ISSN

0733-8724

Type

jour

DOI

10.1109/JLT.2005.863291

Filename

1605343