DocumentCode

865647

Title

Fabrication of ultrathin pinhole-free insulation of aluminium oxide

Author

Schilling, R.B.

Volume

52

Issue

11

fYear

1964

Firstpage

1350

Lastpage

1351

Keywords

Aluminum oxide; Atmosphere; Fabrication; Gases; Insulation; Integrated circuit yield; Needles; Ovens; Substrates; Valves;

fLanguage

English

Journal_Title

Proceedings of the IEEE

Publisher

ieee

ISSN

0018-9219

Type

jour

DOI

10.1109/PROC.1964.3370

Filename

1445300