DocumentCode
866012
Title
Compensation of Aberrations in Achromatic Quadrupole Doublets
Author
Martin, F.W. ; Goloskie, R.
Author_Institution
Microscope Associates, Inc., 50 Village Ave., Dedham, Mass. 02026
Volume
30
Issue
2
fYear
1983
fDate
4/1/1983 12:00:00 AM
Firstpage
1472
Lastpage
1475
Abstract
An achromatic quadrupole lens contains an electric and a magnetic quadrupole lens operated at the proper field ratio. Using a doublet of achromatic lenses in which a quadrupole voltage may be applied to the magnetic poles of one of the lenses in order to rotate its principal section, we have eliminated simultaneously what may be called three first order aberrations of a quadrupole doublet. These are chromatic aberration, rotational misorientation, and focus. By adding suitably chosen small potentials to the quadrupole excitation of an electric lens, 2nd order parasitic aberration may be compensated. Experimental procedure for compensation is described. The procedure appears capable of improvement, and further work is warranted. Currently a beam of 600 keV protons with a width of 0.6 micron is obtained.
Keywords
Electron beams; Electron microscopy; Ion beams; Lenses; Magnetic force microscopy; Particle beams; Physics; Protons; Structural beams; Voltage;
fLanguage
English
Journal_Title
Nuclear Science, IEEE Transactions on
Publisher
ieee
ISSN
0018-9499
Type
jour
DOI
10.1109/TNS.1983.4332563
Filename
4332563
Link To Document