• DocumentCode
    866012
  • Title

    Compensation of Aberrations in Achromatic Quadrupole Doublets

  • Author

    Martin, F.W. ; Goloskie, R.

  • Author_Institution
    Microscope Associates, Inc., 50 Village Ave., Dedham, Mass. 02026
  • Volume
    30
  • Issue
    2
  • fYear
    1983
  • fDate
    4/1/1983 12:00:00 AM
  • Firstpage
    1472
  • Lastpage
    1475
  • Abstract
    An achromatic quadrupole lens contains an electric and a magnetic quadrupole lens operated at the proper field ratio. Using a doublet of achromatic lenses in which a quadrupole voltage may be applied to the magnetic poles of one of the lenses in order to rotate its principal section, we have eliminated simultaneously what may be called three first order aberrations of a quadrupole doublet. These are chromatic aberration, rotational misorientation, and focus. By adding suitably chosen small potentials to the quadrupole excitation of an electric lens, 2nd order parasitic aberration may be compensated. Experimental procedure for compensation is described. The procedure appears capable of improvement, and further work is warranted. Currently a beam of 600 keV protons with a width of 0.6 micron is obtained.
  • Keywords
    Electron beams; Electron microscopy; Ion beams; Lenses; Magnetic force microscopy; Particle beams; Physics; Protons; Structural beams; Voltage;
  • fLanguage
    English
  • Journal_Title
    Nuclear Science, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9499
  • Type

    jour

  • DOI
    10.1109/TNS.1983.4332563
  • Filename
    4332563