DocumentCode
866201
Title
The surface and Microminiaturization
Author
Handler, Paul
Author_Institution
University of Illinois, Urbana, Ill.
Volume
52
Issue
12
fYear
1964
Firstpage
1444
Lastpage
1447
Abstract
The reduction in size of miniature devices which depend, for their operation, upon the volume properties of the material is severely limited by the increase in the surface to volume ratio. After a certain critical size is reached, the surface properties of the material may begin to play a dominant role. Various effects which may occur are discussed and a number of examples are cited. It is suggested that miniaturization may proceed more quickly by utilizing the properties of surfaces in design considerations rather than trying to avoid them.
Keywords
Chemicals; Conductivity; Crystalline materials; Crystals; Insulation; Metal-insulator structures; Semiconductor thin films; Solids; Surface cleaning; Transistors;
fLanguage
English
Journal_Title
Proceedings of the IEEE
Publisher
ieee
ISSN
0018-9219
Type
jour
DOI
10.1109/PROC.1964.3427
Filename
1445357
Link To Document