Title :
Sensors for harsh environments by direct-write thermal spray
Author :
Longtin, Jon ; Sampath, Sanjay ; Tankiewicz, Szymon ; Gambino, Richard J. ; Greenlaw, Robert J.
Author_Institution :
Center for Thermal Spray Res., State Univ. of New York, Stony Brook, NY, USA
Abstract :
High-temperature thermocouple sensors for harsh environments have been fabricated using thermal spray technology with excellent performance demonstrated. Concepts for strain sensors fabricated with thermal spray technology are also being developed. This work reports on functional high-temperature thermocouples and strain gauge concepts fabricated using thermal spray processing.
Keywords :
nanotechnology; semiconductor device manufacture; semiconductor thin films; spray coating techniques; strain sensors; thermal spraying; thermocouples; direct-write electronics; direct-write sensors; direct-write thermal spray; high-temperature thermocouple sensors; high-temperature thermocouples; intelligent sensors; strain gauge; strain measurements; strain sensors; temperature measurement; thermal spray processing.; thermal spray sensors; Chemical sensors; Coatings; Intelligent sensors; Mechanical sensors; Plasma temperature; Protection; Rapid thermal processing; Temperature sensors; Thermal sensors; Thermal spraying;
Journal_Title :
Sensors Journal, IEEE
DOI :
10.1109/JSEN.2003.822218
