Laser-machined piezoelectric cantilevers for mechanical energy harvesting

Author

Kim, Hyunuk ; Bedekar, Vishwas ; Islam, Rashed Adnan ; Lee, Woo-Ho ; Leo, Don ; Priya, Shashank

Author_Institution

Mater. Sci. & Eng., Univ. of Texas at Arlington, Arlington, TX

Volume

55

Issue

9

fYear

2008

fDate

9/1/2008 12:00:00 AM

Firstpage

1900

Lastpage

1905

Abstract

In this study, we report results on a piezoelectric- material-based mechanical energy-harvesting device that was fabricated by combining laser machining with microelectronics packaging technology. It was found that the laser-machining process did not have significant effect on the electrical properties of piezoelectric material. The fabricated device was tested in the low-frequency regime of 50 to 1000 Hz at constant force of 8 g (where g = 9.8 m/s²). The device was found to generate continuous power of 1.13 muW at 870 Hz across a 288.5 kOmega load with a power density of 301.3 muW/cm³.

Keywords

cantilevers; integrated circuits; laser beam machining; piezoelectric devices; frequency 50 Hz to 1000 Hz; laser machining; laser-machined piezoelectric cantilevers; mechanical energy harvesting; microelectronics packaging technology; piezoelectric material; Acceleration; Damping; Machining; Mechanical energy; Optical materials; Optical pulses; Piezoelectric materials; Power generation; Q factor; Vibrations; Acoustics; Electric Power Supplies; Energy Transfer; Equipment Design; Equipment Failure Analysis; Lasers; Motion; Vibration;

fLanguage

English

Journal_Title

Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on

Publisher

ieee

ISSN

0885-3010

Type

jour

DOI

10.1109/TUFFC.881

Filename

4626918