DocumentCode :
866567
Title :
Factors Influencing the Design of Implanters for Metal Applications
Author :
Rose, Peter H.
Author_Institution :
Zymet Inc., Danvers, Massachusetts, U.S.A.
Volume :
30
Issue :
2
fYear :
1983
fDate :
4/1/1983 12:00:00 AM
Firstpage :
1697
Lastpage :
1700
Keywords :
Ceramics; Costs; Inorganic materials; Ion accelerators; Ion beams; Semiconductor device doping; Semiconductor devices; Semiconductor materials; Silicon; Throughput;
fLanguage :
English
Journal_Title :
Nuclear Science, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9499
Type :
jour
DOI :
10.1109/TNS.1983.4332618
Filename :
4332618
Link To Document :
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