Title :
Factors Influencing the Design of Implanters for Metal Applications
Author_Institution :
Zymet Inc., Danvers, Massachusetts, U.S.A.
fDate :
4/1/1983 12:00:00 AM
Keywords :
Ceramics; Costs; Inorganic materials; Ion accelerators; Ion beams; Semiconductor device doping; Semiconductor devices; Semiconductor materials; Silicon; Throughput;
Journal_Title :
Nuclear Science, IEEE Transactions on
DOI :
10.1109/TNS.1983.4332618
