Title :
In Situ Studies of Emission Characteristics of the DC Thermal Arc Plasma Column During Synthesis of Nano-AlN Particles
Author :
Banerjee, Indrani ; Joshi, N.K. ; Sahasrabudhe, S.N. ; Karmakar, Soumen ; Kulkarni, Naveen V. ; Ghorui, S. ; Tak, Atul K. ; Murthy, Shri P S S ; Bhoraskar, S.V. ; Das, A.K.
Author_Institution :
Dept. of Phys., Univ. of Pune
Abstract :
The growth process of nanoparticles and nanowires of AlN by thermal-plasma-assisted gas phase condensation reaction has been investigated by optical emission spectroscopy. The concentrations of the reacting precursors in the plasma have been correlated to the crystalline phases of nanoparticles of AlN found from X-ray diffraction analysis. The size and morphology of the nanoparticles have been studied by transmission electron microscope investigations of as-synthesized powder at a set of reactor parameters, which included arc current, reactor pressure, and standoffs of the arc column. An attempt has been made to correlate the growth of AlN to that of the precursor density present in the plasma reaction zone
Keywords :
III-V semiconductors; X-ray diffraction; aluminium compounds; arcs (electric); nanoparticles; nanotechnology; nanowires; plasma density; plasma diagnostics; plasma materials processing; plasma transport processes; semiconductor growth; transmission electron microscopy; wide band gap semiconductors; AlN; DC thermal arc plasma column; X-ray diffraction; arc current; crystalline phases; nanoparticles; nanowires; optical emission spectroscopy; reactor pressure; thermal-plasma-assisted gas phase condensation reaction; transmission electron microscope; Crystallization; Electron optics; Inductors; Nanoparticles; Nanowires; Optical diffraction; Plasma x-ray sources; Spectroscopy; Stimulated emission; X-ray diffraction; Nanoparticle synthesis; optical emission spectroscopy (OES); plasma arc devices;
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.2006.886059
