Title :
Magnetostriction and in-situ measurement of stress of Co/Pd compositionally modulated multilayer films during fabrication
Author :
Awano, H. ; Suzuki, Y. ; Yamazaki, T. ; Katayama, T. ; Itoh, A.
Author_Institution :
Dept. of Electron. Eng., Nihon Univ., Chiba, Japan
fDate :
9/1/1990 12:00:00 AM
Abstract :
The internal stress (σint) at the interface of each layer of Co(8 Å)/Pd (40 Å) compositionally modulated multilayer film (CMF) was successfully measured with the aim of evaluating stress-induced anisotropy. The CMF was prepared by vacuum evaporation, and the in situ measurement of σint was done during fabrication. It was clarified that the Co layer was subject to constant large tensile stress from the Pd layer. This stress was much smaller than that estimated according to the lattice mismatch between Co and Pd. It was also found that Pd layer evaporated on Co layer was subject to compressive stress; however, it extended over only one or two monolayers before changing to tensile stress again. For the sputtered films, the magnetostriction constants were measured, and the relationship between perpendicular magnetic anisotropy and stress-induced anisotropy was examined
Keywords :
induced anisotropy (magnetic); internal stresses; magnetic thin films; magnetostriction; metallic superlattices; palladium; sputtered coatings; vacuum deposited coatings; 40 angstroms; 8 angstroms; Co-Pd multilayer film; compositionally modulated multilayer film; compressive stress; in-situ stress measurement; lattice mismatch; magnetostriction constants; perpendicular magnetic anisotropy; sputtered films; stress-induced anisotropy; tensile stress; vacuum evaporation; Anisotropic magnetoresistance; Compressive stress; Fabrication; Internal stresses; Lattices; Magnetic modulators; Magnetic multilayers; Magnetostriction; Stress measurement; Tensile stress;
Journal_Title :
Magnetics, IEEE Transactions on