DocumentCode :
868083
Title :
Observation of inversion layers under insulated-gate electrodes using a scanning-electron microscope
Author :
Green, Dale ; Nathanson, H.C.
Volume :
53
Issue :
2
fYear :
1965
Firstpage :
183
Lastpage :
184
Keywords :
Brightness; Capacitance measurement; Displays; Electrodes; Electron beams; Insulation; Scanning electron microscopy; Silicon; Tunneling; Voltage;
fLanguage :
English
Journal_Title :
Proceedings of the IEEE
Publisher :
ieee
ISSN :
0018-9219
Type :
jour
DOI :
10.1109/PROC.1965.3611
Filename :
1445541
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=868083
