Title :
Magnetics and microstructure of sputtered Ni80Fe20 /SiO2 multilayer films
Author :
Russak, Michael A. ; Jahnes, Christopher V. ; Re, Mark E. ; Webb, Rucknell C. ; Mirzamaani, S. Mohamaad
Author_Institution :
IBM Thomas J. Watson Res. Center, Yorktown Heights, NY, USA
fDate :
9/1/1990 12:00:00 AM
Abstract :
Multilayered Ni80Fe20/SiO2 films have been produced by sputter deposition. The effects of lamination on the bulk magnetic properties, microstructure, and high-frequency permeability of stacks with various Ni80Fe20 and SiO2 thicknesses were investigated. In general, laminated films with a total magnetic thickness of 1.5 μm had significantly lower Hc and extended frequency response, compared to unlaminated films of the same magnetic thickness. In addition, the impact of lamination on domain configuration of yoke-shaped structures was determined, and excellent agreement with micromagnetic theoretical prediction was obtained
Keywords :
ferromagnetic properties of substances; iron alloys; magnetic permeability; magnetic thin films; nickel alloys; silicon compounds; sputtered coatings; superlattices; Ni80Fe20-SiO2; bulk magnetic properties; frequency response; high-frequency permeability; magnetic thickness; micromagnetic theoretical prediction; microstructure; sputter deposition; yoke-shaped structures; Couplings; Grain size; Iron; Laminates; Magnetic films; Magnetic multilayers; Magnetostatics; Microstructure; Sputtering; Substrates;
Journal_Title :
Magnetics, IEEE Transactions on
