Title :
Fabrication of a planar polymeric deformation Bragg sensor component by excimer laser radiation
Author :
Wochnowski, Carsten ; Kouamo, Michel Tchamo ; Pieper, Wilhelm ; Meteva, Krassimira ; Metev, Simeon ; Wenke, Gerhard ; Vollertsen, Frank
Author_Institution :
Bremer Inst. fur Angewandte Strahltechnik, Bremen, Germany
fDate :
4/1/2006 12:00:00 AM
Abstract :
Polymethylmethacrylate is irradiated by a UV-laser in order to modify its optical properties photochemically. Thus, by a lithographic method, the refractive index can be locally increased in a controllable way permitting the manufacturing of integrated-optical waveguiding and dispersive structures at the surface of a planar polymer chip. By this method, a polymeric Bragg sensor in integrated-optical form was fabricated by the UV-light of an excimer laser. The surface topography and the functional properties of the planar polymeric deformation Bragg sensor have been examined. Experiments concerning the evanescent field of the sensor have also been carried out in order to clarify the Bragg reflection mechanism.
Keywords :
Bragg gratings; excimer lasers; fibre optic sensors; integrated optics; laser materials processing; polymers; surface topography; ultraviolet lithography; Bragg reflection; UV-laser irradiation; dispersive structures; excimer laser radiation; integrated optics; integrated-optical waveguiding structure; lithographic method; planar polymer chip; planar polymeric deformation Bragg sensor; polymethylmethacrylate material; refractive index; surface topography; Manufacturing; Optical device fabrication; Optical polymers; Optical refraction; Optical sensors; Optical surface waves; Optical variables control; Photochemistry; Refractive index; Surface topography; Bragg deformation sensor; Bragg grating; evanescent field; immersion liquid; integrated optics; polymer; surface topography;
Journal_Title :
Sensors Journal, IEEE
DOI :
10.1109/JSEN.2005.860319
