DocumentCode :
87371
Title :
W-Shaped Cantilevers for Scanning Force Microscopy
Author :
Le Rouzic, J. ; Vairac, Pascal ; Cavallier, B. ; Cretin, B.
Author_Institution :
Dept. of Mech. Eng., Imperial Coll. London, London, UK
Volume :
13
Issue :
4
fYear :
2013
fDate :
Apr-13
Firstpage :
1340
Lastpage :
1346
Abstract :
This paper deals with the tip tilt occurring in scanning force microscopy during contact. Tangential forces lead to affect the localization of the measurement and prevent the quantification of local contact stiffness. Both are crucial for an accurate mechanical characterization of materials with high spatial resolution. Specific W-shaped cantilevers, using a mechanical compensating mechanism, have been designed to keep the tip vertical and get around these problems. They have been simulated with finite-element softwares and validated experimentally on the scanning microdeformation microscope. The promising results show that the principle could be used in other types of scanning force microscopies.
Keywords :
atomic force microscopy; cantilevers; deformation; elastic constants; elastic moduli measurement; finite element analysis; W-shaped cantilevers; finite-element softwares; high spatial resolution; local contact stiffness quantification; material mechanical characterization; mechanical compensating mechanism; scanning force microscopy; scanning microdeformation microscope; tangential forces; tip tilt; Finite element methods; Force; Microscopy; Shape; Silicon; Vibrations; Atomic force microscopy; micromechanical devices; sensor phenomena and characterization;
fLanguage :
English
Journal_Title :
Sensors Journal, IEEE
Publisher :
ieee
ISSN :
1530-437X
Type :
jour
DOI :
10.1109/JSEN.2012.2232784
Filename :
6376086
Link To Document :
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