KTa/sub 0.6/Nb/sub 0.4/O/sub 3/ ferroelectric thin film behavior at microwave frequencies for tunable applications

Author

Laur, Vincent ; Rousseau, Anthony ; Tanné, Gérard ; Laurent, Paul ; Députier, Stéphanie ; Guilloux-Viry, Maryline ; Huret, Fabrice

Author_Institution

Brest Univ.

Volume

53

Issue

12

fYear

2006

fDate

12/1/2006 12:00:00 AM

Firstpage

2280

Lastpage

2286

Abstract

In this study about the relationships between structural and microwave electrical properties of KTa_1-xNb_xO₃ (KTN) ferroelectric materials, a KTN thin film was deposited on different substrates to investigate how KTN growth affects the microwave behavior. Interdigital capacitors and stubs were made on these films through a simple engraving process. Microwave measurements under a static electric field showed the importance of the substrate on the circuit behavior and, notably, on the tuning factor

Keywords

circuit tuning; ferroelectric thin films; microwave materials; potassium compounds; substrates; KTaO₃NbO₃; circuit behavior; engraving process; ferroelectric thin film; interdigital capacitors; microwave electrical properties; structural properties; tuning factor; Capacitors; Ferroelectric films; Ferroelectric materials; Microwave frequencies; Niobium; Sputtering; Substrates; Thin film circuits; Transistors; Tunable circuits and devices;

fLanguage

English

Journal_Title

Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on

Publisher

ieee

ISSN

0885-3010

Type

jour

DOI

10.1109/TUFFC.2006.174

Filename

4037262