Ferroelectric-based electrostatic micromotors with nanometer gaps

Author

Kostsov, G.

Author_Institution

Lab. for THin-Film Ferroelectric Structures, Inst. of Autom. & Electrometry, Novosibirsk

Volume

53

Issue

12

fYear

2006

fDate

12/1/2006 12:00:00 AM

Firstpage

2294

Lastpage

2298

Abstract

The design of the capacitive motors that are based on the electrostatic rolling of the thin metallic film on the ferroelectric surface is studied. It is shown that this method of energy conversion allows one to move the main stage of electromechanical energy conversion into the nanometer range when using the materials with high dielectric permeability (more than 500). The analysis of the distribution of the forces and field in the nanometer gap of the electrostatic micromotors is carried out. An experimental investigation of these micromotors is performed

Keywords

capacitor motors; electrostatic motors; ferroelectric devices; piezoelectricity; thin film devices; dielectric permeability; electromechanical energy conversion; electrostatic micromotors; electrostatic rolling; ferroelectric surface; nanometer gaps; thin metallic film; Dielectric thin films; Electrostatics; Energy conversion; Ferroelectric materials; Induction motors; Magnetic domains; Magnetic fields; Micromotors; Permeability; Voltage;

fLanguage

English

Journal_Title

Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on

Publisher

ieee

ISSN

0885-3010

Type

jour

DOI

10.1109/TUFFC.2006.176

Filename

4037264