DocumentCode :
873971
Title :
Piezoelectric ultrathin lead titanate films prepared by deposition of aquo-diol solutions
Author :
Ricote, Jesus ; Holgado, Susana ; Ramos, Pablo ; Calzada, M.Lourdes
Author_Institution :
Instituto de Ciencia de Materiales de Madrid, Consejo Superior de Investigaciones Cientificas, Madrid
Volume :
53
Issue :
12
fYear :
2006
fDate :
12/1/2006 12:00:00 AM
Firstpage :
2299
Lastpage :
2304
Abstract :
We report on the preparation of continuous ultrathin ferroelectric films of pure lead titanate by chemical solution deposition (CSD) methods. Aquo-diol solutions highly diluted have been used to obtain films with thickness down to 13 nm, the lowest reported for CSD films. The formation of islands instead of continuous coatings, which has been reported when CSD is used to prepare ultrathin films, is avoided here. The piezoelectric activity of the films has been characterized by piezoresponse force microscopy, showing that the thinnest film obtained retains a significant piezoelectric activity at the nanoscale, which is promising for their use as transducer elements in nanoelectromechanical systems (NEMS)
Keywords :
atomic force microscopy; ferroelectric thin films; lead compounds; liquid phase deposition; organic compounds; oxygen compounds; piezoelectric thin films; titanium compounds; PbTiO3; aquo-diol solution deposition; chemical solution deposition; lead titanate; piezoelectric activity; piezoelectric ultrathin films; piezoresponse force microscopy; ultrathin ferroelectric films; Capacitors; Chemicals; Coatings; Ferroelectric films; Ferroelectric materials; Micromechanical devices; Nanoelectromechanical systems; Piezoelectric films; Temperature; Titanium compounds;
fLanguage :
English
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
Publisher :
ieee
ISSN :
0885-3010
Type :
jour
DOI :
10.1109/TUFFC.2006.177
Filename :
4037265
Link To Document :
بازگشت