Title :
Potential of acoustic imaging in the detection of nanometer gaps
Author :
Tohmyoh, Hironori ; Saka, Masumi ; Hirayama, Hayato
Author_Institution :
Dept. of Nanomechanics, Tohoku Univ., Sendai
fDate :
12/1/2006 12:00:00 AM
Abstract :
The potential of the water-immersion and dry-contact acoustic imaging techniques for detecting nanometer gaps embedded in silicon is studied. The sensitivity for detecting gaps of over 10 nm in height is governed only by the lateral resolution of the imaging and is independent of the height of the gap
Keywords :
acoustic microscopy; nanotechnology; silicon; ultrasonic imaging; ultrasonic materials testing; Si; dry-contact acoustic imaging; lateral imaging resolution; nanometer gap detection; silicon; water-immersion acoustic imaging; Acoustic imaging; Acoustic signal detection; Bonding; Image resolution; Polymers; Resonance; Silicon; Solids; Ultrasonic imaging; Underwater acoustics;
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
DOI :
10.1109/TUFFC.2006.196
