DocumentCode :
874594
Title :
Gold-coated scanning probes for direct `write`of sub-micron metallic structures
Author :
Yapici, M.K. ; Lee, Hongseok ; Zou, Jingxin ; Liang, Hongjing
Author_Institution :
Dept. of Electr. & Comput. Eng., Texas A&M Univ., College Station, TX
Volume :
3
Issue :
3
fYear :
2008
fDate :
9/1/2008 12:00:00 AM
Firstpage :
90
Lastpage :
94
Abstract :
The fabrication and application of new gold-coated scanning probes (SPs) for direct ´write´ of sub-micron metallic structures are reported. The SP consists of a base structure made of silicon nitride and a thin gold coating. The tip profile and radius of curvature are tightly controlled in the probe fabrication to ensure a predictable tip-substrate contact. By scanning a fabricated probe on a single crystal silicon surface in an ambient environment, sub-micron gold lines were formed as a result of direct gold material transfer from the SP tip onto the silicon surface, which is believed to be induced by the friction and wear associated with the probe scanning.
Keywords :
coatings; gold; scanning probe microscopy; silicon compounds; Au-SiN; Si; direct write; friction; gold-coated scanning probes; silicon nitride; single crystal silicon surface; submicron metallic structures; thin gold coating; tip-substrate contact; wear;
fLanguage :
English
Journal_Title :
Micro & Nano Letters, IET
Publisher :
iet
ISSN :
1750-0443
Type :
jour
DOI :
10.1049/mnl:20080013
Filename :
4634716
Link To Document :
بازگشت