DocumentCode :
875117
Title :
Unsticking MEMS - [update]
Author :
Das, Saswato R.
Volume :
45
Issue :
10
fYear :
2008
Firstpage :
18
Lastpage :
18
Abstract :
Researchers at Los Alamos National Laboratory, in New Mexico, think they may have the answer to a vexing problem called stiction, which causes ultrasmall components of microelectromechanical systems (MEMS) to stick together. This impediment to micromovement is caused by the Casimir effect (after the Dutch theoretical physicist Hendrik Casimir), an odd attractive force that influences only objects that are very close together. As MEMS components are shrunk to a scale of hundreds of nanometers or less, many engineers predict that the Casimir effect will become more of a problem.
Keywords :
Laboratories; Micromechanical devices; Robots;
fLanguage :
English
Journal_Title :
Spectrum, IEEE
Publisher :
ieee
ISSN :
0018-9235
Type :
jour
DOI :
10.1109/MSPEC.2008.4635042
Filename :
4635042
Link To Document :
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