Title :
Silicon micromachined waveguides for millimeter-wave and submillimeter-wave frequencies
Author :
McGrath, William R. ; Walker, Christopher ; Yap, Markus ; Tai, Yu-Chong
Author_Institution :
Jet Propulsion Lab., California Inst. of Technol., Pasadena, CA, USA
fDate :
3/1/1993 12:00:00 AM
Abstract :
The development of micromachining techniques to create silicon-based waveguide circuits, which can operate up to high submillimeter-wave frequencies, is reported. As a first step, a WR-10 waveguide has been fabricated from
Keywords :
MMIC; elemental semiconductors; etching; silicon; submillimetre wave devices; waveguides; Au-Si; WR-10 waveguide; active devices; fabrication; insertion loss; loss measurements; micromachined waveguides; millimeter-wave; planar circuits; submillimeter-wave frequencies; waveguide circuits; Frequency; Insertion loss; Loss measurement; Micromachining; Millimeter wave circuits; Millimeter wave measurements; Millimeter wave technology; Silicon; Submillimeter wave integrated circuits; Submillimeter wave technology;
Journal_Title :
Microwave and Guided Wave Letters, IEEE
