Title :
Some reliability considerations pertaining to LSI technology
Author :
Schlacter, Michael M. ; Keen, Ralph S., Jr. ; Schnable, George L.
fDate :
10/1/1971 12:00:00 AM
Abstract :
This paper discusses the trends that have developed in LSI, and the requirements for refinements in process technology, closer process control, and improvements in design that are considered to be essential for the full realization of high LSI reliability. Particular attention is paid to advanced multilevel-structure processing and to the use of specially designed test vehicles for purposes of process improvement and process control.
Keywords :
Large scale integration; Reliability; large scale integration; reliability; Circuit testing; Complexity theory; Cost function; Helium; Large scale integration; Microelectronics; Plastic packaging; Process control; Vehicles; Wire;
Journal_Title :
Solid-State Circuits, IEEE Journal of
DOI :
10.1109/JSSC.1971.1050195
