Title :
Multimodal Electrothermal Silicon Microgrippers for Nanotube Manipulation
Author :
Andersen, Karin Nordström ; Petersen, D.H. ; Carlson, K. ; Molhave, K. ; Sardan, Ozlem ; Horsewell, A. ; Eichhorn, Volkmar ; Fatikow, Sergej ; Boggild, Peter
Author_Institution :
MIC-Dept. of Micro & Nanotechnol., Tech. Univ. of Denmark, Lyngby
Abstract :
Microgrippers that are able to manipulate nanoobjects reproducibly are key components in 3-D nanomanipulation systems. We present here a monolithic electrothermal microgripper prepared by silicon microfabrication, and demonstrate pick-and-place of an as-grown carbon nanotube from a 2-D array onto a transmission electron microscopy grid, as a first step toward a reliable and precise pick-and-place process for carbon nanotubes.
Keywords :
carbon nanotubes; elemental semiconductors; grippers; microfabrication; micromanipulators; nanotube devices; silicon; transmission electron microscopy; 2-D array; 3-D nanomanipulation systems; Si; carbon nanotube; monolithic electrothermal silicon microgripper; nanotube manipulation; pick-place process; silicon microfabrication; transmission electron microscopy; Carbon nanotubes; microgrippers; nanomanipulation; pick-and-place;
Journal_Title :
Nanotechnology, IEEE Transactions on
DOI :
10.1109/TNANO.2008.2006558
