Title :
The voltage-doping transformation: a new approach to the modeling of MOSFET short-channel effects
Author :
Skotnicki, Tomasz ; Merckel, Gerard ; Pedron, Thierry
Author_Institution :
CNET-CN, Meylan, France
fDate :
3/1/1988 12:00:00 AM
Abstract :
It is shown that the influence of the drain-source field on the potential barrier height is physically equivalent to and can be replaced by a reduction in channel doping concentration according to a formula derived from the two-dimensional Poisson equation. The actual barrier height for any drain bias and channel length, on which the derived equation depends, can be calculated easily using well-known one-dimensional (long-channel) solutions. This simple but general procedure, called the voltage-doping transformation (VDT), is shown to lead to analytically calculated potential distributions in fairly good agreement with two-dimensional numerical simulation. An application of the VDT to threshold voltage (V/sub tj/) calculations also is shown. The V/sub th/ model is compared with measurements taken on implanted n-MOSFETs with various channel lengths. Good agreement demonstrates the accuracy of both the VDT and the new V/sub th/ model.<>
Keywords :
insulated gate field effect transistors; semiconductor device models; semiconductor doping; MOSFET short-channel effects; channel doping concentration; channel length; channel lengths; drain bias; drain-source field; potential barrier height; threshold voltage; two-dimensional Poisson equation; two-dimensional numerical simulation; voltage-doping transformation; Coordinate measuring machines; Current measurement; Doping; Length measurement; MOSFET circuits; Numerical simulation; Poisson equations; Semiconductor process modeling; Threshold voltage;
Journal_Title :
Electron Device Letters, IEEE