DocumentCode :
877675
Title :
Orientation dependence of built-in surface charge on thermally oxidized Silicon
Author :
Balk, P. ; Burkhardt, P.J. ; Gregor, L.V.
Volume :
53
Issue :
12
fYear :
1965
Firstpage :
2133
Lastpage :
2134
Keywords :
Aluminum; Capacitance measurement; Electric variables measurement; Electrodes; Equations; Inspection; Oxidation; Silicon; Temperature control; Testing;
fLanguage :
English
Journal_Title :
Proceedings of the IEEE
Publisher :
ieee
ISSN :
0018-9219
Type :
jour
DOI :
10.1109/PROC.1965.4513
Filename :
1446443
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=877675
