DocumentCode :
878057
Title :
High resistivity sputtered tantalum films for microelectronic applications
Author :
Krikorian, E. ; Berson, B.E.
Volume :
53
Issue :
12
fYear :
1965
Firstpage :
2164
Lastpage :
2164
Keywords :
Circuits; Conductivity; Electrical resistance measurement; Low voltage; Microelectronics; Preamplifiers; Resistors; Sputtering; Substrates; Temperature;
fLanguage :
English
Journal_Title :
Proceedings of the IEEE
Publisher :
ieee
ISSN :
0018-9219
Type :
jour
DOI :
10.1109/PROC.1965.4546
Filename :
1446476
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=878057
