Title :
A new spin cast process for mass-production of polycrystalline silicon sheets
Author :
Hide, Ichiro ; Matsuyama, Takeshi ; Suzuki, Mikiya ; Yamashita, Hiroshi ; Suzuki, Tomoya ; Moritani, Toshiaki ; Maeda, Yasuhiro
Author_Institution :
Hoxan Corp., Sapporo, Japan
fDate :
2/1/1990 12:00:00 AM
Abstract :
A spin cast process for producing polycrystalline silicon sheets for low-cost and high-efficiency solar cells and equipment for its application to mass production are discussed. This process makes it possible to produce high-quality silicon sheets with a production rate of 15 s/sheet. A maximum solar cell efficiency of over 13% is obtained. To reduce production time, a crystal growth zone occurs in the equipment between the spinning zone and the cooling zone. The crystal grows after the spinning process with a physical growth rate of 20 mm/min when mold modules in the crystal growth zone are transferred to the cooling zone
Keywords :
elemental semiconductors; semiconductor device manufacture; semiconductor growth; silicon; solar cells; 1.2E-3 kph; Si; cooling zone; crystal growth zone; growth rate; high-efficiency solar cells; low cost solar cells; mass-production; production rate; production time; semiconductors; solar cell efficiency; spin cast process; spinning zone; Cooling; Helium; Mass production; Photovoltaic cells; Prototypes; Silicon; Spinning; Stress; Throughput;
Journal_Title :
Electron Devices, IEEE Transactions on