DocumentCode
879573
Title
MIPS transducer microphone
Author
Muller, R.S. ; Conragan, J.
Volume
54
Issue
2
fYear
1966
Firstpage
337
Lastpage
337
Keywords
Capacitive sensors; Laboratories; Metal-insulator structures; Microphones; Piezoelectric films; Piezoelectric transducers; Semiconductor diodes; Semiconductor films; Semiconductor materials; Substrates;
fLanguage
English
Journal_Title
Proceedings of the IEEE
Publisher
ieee
ISSN
0018-9219
Type
jour
DOI
10.1109/PROC.1966.4688
Filename
1446618
Link To Document