DocumentCode :
880052
Title :
Sensitivity of resist-coated silicon slices to argon-laser wavelengths
Author :
Beesley, M.J.
Volume :
5
Issue :
12
fYear :
1969
Firstpage :
257
Lastpage :
258
Keywords :
integrated circuit production; thin films;
fLanguage :
English
Journal_Title :
Electronics Letters
Publisher :
iet
ISSN :
0013-5194
Type :
jour
DOI :
10.1049/el:19690197
Filename :
4210414
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=880052
