NENDEP-a simple n-channel MOS technology for logic circuits

A relatively simple technology which uses six masking steps is presented. This technology is useful for fabricating logic circuits with depletion load devices. Threshold adjustment of the driver devices was obtained by a boron implantation. Self-alignment results from a phosphorus implantation. The technological procedure is described in detail and the motivation for the various processing steps is explained. A ring oscillator was fabricated to test the usefulness of the technology and to check the results of a computer-aided circuit analysis program.