DocumentCode
880625
Title
Cleaning (electronics industry safety)
Author
Perry, T.S.
Volume
30
Issue
2
fYear
1993
Firstpage
20
Lastpage
26
Abstract
The problems posed by toxic materials used in electronics manufacturing are examined. The materials posing the greatest risks to workers and the environment are discussed. They are the ethylene glycol ethers used to thin the photoresist used in IC manufacture; fluorocarbons and trichloroethane, which destroy atmospheric ozone; and heavy metals. The search for alternatives is described.<>
Keywords
electronics industry; health hazards; integrated circuit manufacture; personnel; safety; IC manufacture; electronics industry; environment; ethylene glycol ethers; fluorocarbons; health hazards; heavy metals; manufacturing; ozone; photoresists; safety; toxic materials; trichloroethane; Animals; Anti-freeze; Chemicals; Cleaning; Electronics industry; Lithography; Production; Resists; Safety; Silicon;
fLanguage
English
Journal_Title
Spectrum, IEEE
Publisher
ieee
ISSN
0018-9235
Type
jour
DOI
10.1109/6.208358
Filename
208358
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