Title :
Capacitance models for integrated circuit metallization wires
Author :
Ruehli, Albert E. ; Brennan, Pierce A.
fDate :
12/1/1975 12:00:00 AM
Abstract :
New concepts are introduced relating aspects of circuit theory to the multicapacitances which can be obtained from a computer program for multiconductor geometries. These concepts are applied to the wiring of an integrated circuit chip. Capacitances are found for crossovers, vias, and right angle bends for a realistic geometry.
Keywords :
Capacitance; Computer-aided circuit analysis; Metallisation; Monolithic integrated circuits; capacitance; computer-aided circuit analysis; metallisation; monolithic integrated circuits; Capacitance; Circuit theory; Computational geometry; Conductors; Equivalent circuits; Integrated circuit metallization; Integrated circuit modeling; Senior members; Wires; Wiring;
Journal_Title :
Solid-State Circuits, IEEE Journal of
DOI :
10.1109/JSSC.1975.1050654
