DocumentCode :
881898
Title :
Coplanar waveguides on dielectric membranes micromachined on a GaAs substrate
Author :
Salzenstein, P. ; Dupuis, O. ; Hélal, M. ; Lheurette, E. ; Vanbésien, O. ; Mounaix, P. ; Lippens, D.
Author_Institution :
Inst. d´´Electron. et de Microelectron. du Nord, Univ. des Sci. et Tech. de Lille Flandres Artois, Villeneuve d´´Ascq, France
Volume :
32
Issue :
9
fYear :
1996
fDate :
4/25/1996 12:00:00 AM
Firstpage :
821
Lastpage :
822
Abstract :
GaAs micromachining technology was used for fabricating coplanar transmission lines on Si3N4 and polyimide membranes deposited on GaAs substrates. On-wafer measurements of scattering parameters up to 75 GHz for several line configurations show a constant phase velocity of 2.9 108 m/s and a predominance of metallic losses with a square root frequency dependence
Keywords :
MIMIC; MMIC; S-parameters; coplanar waveguides; etching; gallium arsenide; integrated circuit metallisation; membranes; micromachining; 75 GHz; CPW; GaAs; GaAs micromachining technology; GaAs substrate; Si3N4; Si3N4 membrane; constant phase velocity; coplanar transmission lines; coplanar waveguides; dielectric membranes; fabrication; metallic losses; micromachined membranes; polyimide membrane; scattering parameters;
fLanguage :
English
Journal_Title :
Electronics Letters
Publisher :
iet
ISSN :
0013-5194
Type :
jour
DOI :
10.1049/el:19960564
Filename :
492943
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=881898
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