Title :
A new two-dimensional model for the potential distribution of short gate-length MESFET´s and its applications
Author :
Chin, Shan-Ping ; Wu, Ching-Yuan
Author_Institution :
Adv. Semicond. Device Res. Lab., Nat. Chiao-Tung Univ., Hsinchu, Taiwan
fDate :
8/1/1992 12:00:00 AM
Abstract :
A new analytical technique for calculating the 2-D potential distribution of a MESFET device operated in the subthreshold region is proposed, in which the 2-D Poisson´s equation is solved by the Green´s function technique. The potential and electric-field distributions of a non-self-aligned MESFET device are calculated exactly from different types of Green´s function in different boundary regions, and the sidewall potential at the interface between these regions can be determined by the continuation of the electric field at the sidewall boundary. The remarkable feature of the proposed method is that the implanted doping profile in the active channel can be treated. Furthermore, a simplified technique is developed to derive a set of quasi-analytical models for the sidewall potential at both sides of the gate edge, the threshold voltage of short gate-length devices, and the drain-induced barrier lowering. Moreover, the developed quasi-analytical models are compared with the results of 2-D numerical analysis and good agreements are obtained
Keywords :
Green´s function methods; III-V semiconductors; Schottky gate field effect transistors; electric potential; gallium arsenide; semiconductor device models; 2D potential distribution; GaAs; Green´s function technique; Poisson´s equation; drain-induced barrier lowering; electric-field distributions; implanted doping profile; numerical analysis; quasi-analytical models; semiconductor; short gate length MESFET; sidewall boundary; sidewall potential; subthreshold region; threshold voltage; two-dimensional model; Doping profiles; Electric potential; Gallium arsenide; Impurities; MESFETs; Numerical analysis; Numerical simulation; Poisson equations; Semiconductor process modeling; Threshold voltage;
Journal_Title :
Electron Devices, IEEE Transactions on