Title :
Model for the anomalous off-current of polysilicon thin-film transistors and diodes
Author :
Rodriguez, Angel ; Moreno, Eugenio G. ; Pattyn, Hugo ; Nijs, Johan F. ; Mertens, Robert P.
Author_Institution :
Polytech. Univ. of Barcelona, Spain
fDate :
5/1/1993 12:00:00 AM
Abstract :
Due to the different crystallographic orientations of the grains in polysilicon thin films, their grain boundaries exhibit a high density of crystallographic defects that are often electrically active. Applying the equations of the transitions between different defect energy levels to a simple junction theory, the qualitative and, to a certain extent, quantitative characteristic trends of the reverse current of such defected junctions can be explained. This constitutes an important modeling method of a problem that still exists in the use of polysilicon thin-film transistors for certain applications
Keywords :
defect electron energy states; elemental semiconductors; grain boundaries; leakage currents; semiconductor device models; silicon; thin film transistors; Si-SiO2; anomalous off-current; crystallographic grain orientations; defect energy levels; diodes; electrically active defects; grain boundaries; junction theory; leakage current; modeling method; polysilicon thin-film transistors; reverse current; Active matrix organic light emitting diodes; Circuits; Crystallography; Equations; Fabrication; Grain boundaries; Leakage current; Temperature; Thin film transistors; Voltage;
Journal_Title :
Electron Devices, IEEE Transactions on