Title :
Evaluation of electron injection current density in p-layers for injection modeling of I/sup 2/L
Author :
Heimeier, Helmut H. ; Berger, Horst H.
fDate :
4/1/1977 12:00:00 AM
Abstract :
Proportionality between electron injection current density and sheet resistance of p-layers having a sink boundary has been found over a two orders of magnitude range of sheet resistance. This facilitates prediction of electron injection parameters for injection modeling and process control of I/SUP 2/L/MTL.
Keywords :
Bipolar integrated circuits; Integrated logic circuits; Semiconductor device models; bipolar integrated circuits; integrated logic circuits; semiconductor device models; Charge carrier processes; Current density; Doping; Electrons; Laboratories; Predictive models; Process control; Production; Radiative recombination; Resists;
Journal_Title :
Solid-State Circuits, IEEE Journal of
DOI :
10.1109/JSSC.1977.1050872
