Title :
Low Ã\x9f Ion Acceleration with the FOM Meqalac-System
Author :
Thomae, R.W. ; Siebenlist, F. ; van Amersfoort, P.W. ; Schonewille, F.G. ; Granneman, E.H.A. ; Klein, H. ; Schempp, A. ; Weis, T.
Author_Institution :
FOM-Institute for Atomic and Molecular Physics, Kruislaan 407, 1098 SJ Amsterdam, The Netherlands
Abstract :
The FOM MEQALAC (Multiple Electrostatic Quadrupole Array Linear ACcelerator) system in which four He+ ion beams of 2.2 mA are accelerated from 40 to 120 keV is discussed. The cavity has a modified Interdigital H structure (TE111). In between the 20 acceleration gaps electrostatic quadrupole lenses are placed to achieve radial stability of the beams. Some fundamental considerations concerning the design of MEQALAC systems are presented. Furthermore, parameters for plasma diagnostics and ion implantation accelerators are given.
Keywords :
Acceleration; Electrostatics; Ion accelerators; Ion beams; Ion implantation; Lenses; Linear accelerators; Particle beams; Plasma diagnostics; Stability;
Journal_Title :
Nuclear Science, IEEE Transactions on
DOI :
10.1109/TNS.1985.4334309
