DocumentCode
883736
Title
Low Ã\x9f Ion Acceleration with the FOM Meqalac-System
Author
Thomae, R.W. ; Siebenlist, F. ; van Amersfoort, P.W. ; Schonewille, F.G. ; Granneman, E.H.A. ; Klein, H. ; Schempp, A. ; Weis, T.
Author_Institution
FOM-Institute for Atomic and Molecular Physics, Kruislaan 407, 1098 SJ Amsterdam, The Netherlands
Volume
32
Issue
5
fYear
1985
Firstpage
3172
Lastpage
3174
Abstract
The FOM MEQALAC (Multiple Electrostatic Quadrupole Array Linear ACcelerator) system in which four He+ ion beams of 2.2 mA are accelerated from 40 to 120 keV is discussed. The cavity has a modified Interdigital H structure (TE111). In between the 20 acceleration gaps electrostatic quadrupole lenses are placed to achieve radial stability of the beams. Some fundamental considerations concerning the design of MEQALAC systems are presented. Furthermore, parameters for plasma diagnostics and ion implantation accelerators are given.
Keywords
Acceleration; Electrostatics; Ion accelerators; Ion beams; Ion implantation; Lenses; Linear accelerators; Particle beams; Plasma diagnostics; Stability;
fLanguage
English
Journal_Title
Nuclear Science, IEEE Transactions on
Publisher
ieee
ISSN
0018-9499
Type
jour
DOI
10.1109/TNS.1985.4334309
Filename
4334309
Link To Document