Implantation of Intense Pulsed Metallic Ion Beam

The short-duration intense mixed metallic and gaseous ion beams, such as Ti* and N+, produced by the multiplate cnamber with central hole have been used for implantation. The compositions of titanium and nitrogen as a function of depth was determined using Auger electron spectroscopy PHI-550. It is proved that phase transitions of thin layer of steel bombarded by ion beams take place owing to the ion mixing and rapid cooling down of implanted area after melting by the pulsed beams with power density more than 107W/cm2. The effective hardness increase is concluded from microhardness measurements. It is expected that the implantation with pulsed ion beam could open a new way for the significant industrial application.1