Title :
Correction algorithms in a laser scanning dimension measurement system
Author :
Chang, K.-S. ; Lu, S.-T. ; Wu, Y.-P. ; Chou, C.
Author_Institution :
Dept. of Appl. Phys., Chung Cheng Inst. of Technol., Taoyuan, Taiwan
fDate :
3/1/1992 12:00:00 AM
Abstract :
The principal system error in a laser scanning dimension measurement system (LSDMS) is the variation of the scanning speed of the laser beam at different locations of the measuring region, which is caused mainly by the conventionally corrected lens. When a small spin gauge is positioned and measured within the measuring region of the LSDMS, the deviation of the scanning speed from a constant speed can be obtained. This deviation is the criterion on which two correction algorithms are based. The correction algorithms are proposed and discussed, and both show satisfactory improvement in the performance of the LSDMS.
Keywords :
measurement by laser beam; spatial variables measurement; constant speed; correction algorithms; deviation; laser scanning dimension measurement; scanning speed; spatial variables measurement; spin gauge;
Journal_Title :
Science, Measurement and Technology, IEE Proceedings A
