Title :
Temperature measurements of polymer substrates (PMMA) in an RF discharge
Author :
Rochotzki, R. ; Friedrich, M.
Author_Institution :
Dept. of Phys., Univ. of Technol., Chemnitz, Germany
fDate :
3/1/1992 12:00:00 AM
Abstract :
The influence of pressure and applied power on the temperature of polymer substrates (PMMA material) in an RF discharge is studied with the help of laser interferometry. The evaluation of the temperature curves shows that the heat flux from the plasma towards the substrate differs significantly from the applied power. The temperature distribution over the substrate thickness is simulated numerically using the method of finite differences.
Keywords :
high-frequency discharges; light interferometry; measurement by laser beam; polymer films; substrates; surface discharges; temperature measurement; RF discharge; finite differences; heat flux; laser interferometry; polymer substrates; temperature curves; temperature distribution;
Journal_Title :
Science, Measurement and Technology, IEE Proceedings A
