Carbon Nanofiber Nanoelectrode Array: Effect of Process Conditions on Reliability

Author

Wejinya, Uchechukwu C. ; Chalamalasetty, Siva Naga Sandeep ; Zhuxin Dong ; Arumugam, P.U. ; Meyyappan, M.

Author_Institution

Dept. of Mech. Eng., Univ. of Arkansas, Fayetteville, AR, USA

Volume

12

Issue

1

fYear

2013

fDate

Jan. 2013

Firstpage

101

Lastpage

107

Abstract

Nanoelectrode arrays (NEA) using 1-D nanomaterials as the electrode material have shown promise for biosensing applications. Vertical, freestanding, individual carbon nanofibers (CNFs) on patterned substrates constitute one example of NEA in the literature. The development of a biosensor system using this NEA first requires reliability studies prior to undertaking system integration with microfluidics and sample handling aspects. Here, we have investigated the effect of temperature and process conditions on the diameters and quality of the CNFs using atomic force microscopy (AFM). A Taguchi approach is employed to study the temperature effect in etched and unetched CNFs using AFM followed by a statistical analysis.

Keywords

Taguchi methods; atomic force microscopy; bioMEMS; biomedical electrodes; biosensors; carbon fibres; microfluidics; microsensors; nanobiotechnology; nanofibres; nanosensors; reliability; statistical analysis; 1D nanomaterials; AFM; CNF; NEA; Taguchi approach; atomic force microscopy; biosensor; carbon nanofiber nanoelectrode array; electrode material; etching; microfluidics; patterned substrates; reliability; statistical analysis; Arrays; Carbon; Hafnium; Nickel; Substrates; Temperature distribution; Temperature measurement; Carbon nanofiber (CNF); process conditions; reliability; statistical analysis;

fLanguage

English

Journal_Title

Nanotechnology, IEEE Transactions on

Publisher

ieee

ISSN

1536-125X

Type

jour

DOI

10.1109/TNANO.2012.2227496

Filename

6376232