Title :
Silicon-on-Insulator Technologies,--are We Converging on a Technique of Choice?
Author :
Schott, J. T. ; Shedd, W. M.
Author_Institution :
Rome Air Development Center Solid State Sciences Directorate Hanscom AFB, MA 01731
Abstract :
This paper attempts to present an unbiased review and evaluation of the dozen or more techniques under development to fabricate SOI structures. It includes an historical perspective, a review of the state-of-the-art, and an assessment of current SOI development programs in government and industry.
Keywords :
Conferences; Dielectric substrates; Explosives; Government; Implants; Isolation technology; Laboratories; Optical materials; Silicon compounds; Silicon on insulator technology;
Journal_Title :
Nuclear Science, IEEE Transactions on
DOI :
10.1109/TNS.1986.4334606
