1 /spl mu/m MOSFET VLSI technology. VIII. Radiation effects

For pt.VII see ibid., vol.SC14, no.2, p.291 (1979). The effect of electron-beam radiation on polysilicon-gate MOSFETs is examined. The irradiations were performed at 25 kV in a vector scan electron-beam lithography system at dosages typical of those used to expose electron-beam resists. Two types of studies are reported. In the first type, devices fabricated with optical lithography were exposed to blanket electron-beam radiation after fabrication. In the second, discrete devices from a test chip, fabricated entirely with electron-beam lithography, were used.