Title :
A review of thin-film resonator technology
Author_Institution :
TFR Technol. Inc., Bend, OR, USA
Abstract :
Thin-film resonator technology has been under development for over 40 years as a means to reach higher frequencies than obtainable with conventional quartz-crystal technology. Using advances in microelectronic processing, thin films of piezoelectric materials are used to fabricate resonators and filters over a range of 500 MHz to 20 GHz. This article is a review of the thin-film resonator (TFR) technology that describes the core structures and issues and gives examples of filters and resonators that have been manufactured or demonstrated.
Keywords :
crystal resonators; piezoelectric materials; quasicrystals; resonator filters; thin film devices; 500 to 20E3 MHz; TFR technology; core structures; filter fabrication; microelectronic processing; piezoelectric materials; quartz-crystal technology; resonator fabrication; thin-film resonator technology; Electrodes; Equivalent circuits; Piezoelectric films; Piezoelectric materials; RLC circuits; Resonance; Resonant frequency; Resonator filters; Surface acoustic waves; Transistors;
Journal_Title :
Microwave Magazine, IEEE
DOI :
10.1109/MMW.2003.1266067
