DocumentCode
888881
Title
A review of thin-film resonator technology
Author
Lakin, K.M.
Author_Institution
TFR Technol. Inc., Bend, OR, USA
Volume
4
Issue
4
fYear
2003
Firstpage
61
Lastpage
67
Abstract
Thin-film resonator technology has been under development for over 40 years as a means to reach higher frequencies than obtainable with conventional quartz-crystal technology. Using advances in microelectronic processing, thin films of piezoelectric materials are used to fabricate resonators and filters over a range of 500 MHz to 20 GHz. This article is a review of the thin-film resonator (TFR) technology that describes the core structures and issues and gives examples of filters and resonators that have been manufactured or demonstrated.
Keywords
crystal resonators; piezoelectric materials; quasicrystals; resonator filters; thin film devices; 500 to 20E3 MHz; TFR technology; core structures; filter fabrication; microelectronic processing; piezoelectric materials; quartz-crystal technology; resonator fabrication; thin-film resonator technology; Electrodes; Equivalent circuits; Piezoelectric films; Piezoelectric materials; RLC circuits; Resonance; Resonant frequency; Resonator filters; Surface acoustic waves; Transistors;
fLanguage
English
Journal_Title
Microwave Magazine, IEEE
Publisher
ieee
ISSN
1527-3342
Type
jour
DOI
10.1109/MMW.2003.1266067
Filename
1266067
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