Title :
Equivalent circuit model of multiport overlay capacitors
Author :
Dupret, A. ; Belhaire, E. ; Garda, P.
Author_Institution :
Inst. d´´Electron. Fondamentale, Univ. de Paris-Sud, Orsay, France
fDate :
8/17/1995 12:00:00 AM
Abstract :
The planar approach is used to derive a lumped-element equivalent circuit model of multiport MIM capacitors. The values of the equivalent circuit elements are given as closed-form expressions. Validation of the model is performed comparing its results with experimental data measured up to 40 GHz
Keywords :
MIM devices; equivalent circuits; lumped parameter networks; microwave devices; semiconductor device models; thin film capacitors; 1 to 40 GHz; GaAs substrate; MMIC design; closed-form expressions; lumped-element equivalent circuit model; multiport MIM capacitors; multiport overlay capacitors; planar approach;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19950999
