Title :
Downward laser trimming of thick film resistors
Author :
Narayana, T. Badri ; Ramkumar, K. ; Satyam, M.
Author_Institution :
Dept. of Electr. Commun. Eng., Indian Inst. of Sci., Bangalore, India
fDate :
12/1/1991 12:00:00 AM
Abstract :
A method of laser trimming thick-film resistors to lower resistance is presented. It involves heating of certain regions of the resistor film in the form of tracks (to a temperature where a certain transformation in the structure of the film takes place, like segregation of the constituents of the resistor material, but not high enough to evaporate the material) by the use of a laser beam of appropriate power density. The heated regions are found to become regions of very high electrical conductivity. It has been found that trimming tracks made perpendicular the current flow direction are not effective in reducing the resistance. Trimming tracks made along the direction of their current flow are found to decrease the value of the resistance. It has been found that the resistance decreases with an increase in length and width of the track. The authors provide data from computer simulations and measurements made on analog networks that enable design of trimming tracks
Keywords :
laser beam machining; thick film resistors; computer simulations; design of trimming tracks; film structure transformation; laser trimming of thick film resistors; measurements; regions of high conductivity; resistance lowering; resistance reduction; segregation of constituents; temperature coefficient of resistance; voltage coefficient of resistance; Conducting materials; Conductivity; Electric resistance; Laser beams; Optical materials; Power lasers; Resistance heating; Resistors; Temperature; Thick films;
Journal_Title :
Components, Hybrids, and Manufacturing Technology, IEEE Transactions on