DocumentCode
890394
Title
The interdependence of geometrical, thermal, and electrical limitations for VLSI logic
Author
Folberth, O.G.
Volume
16
Issue
1
fYear
1981
fDate
2/1/1981 12:00:00 AM
Firstpage
51
Lastpage
53
Abstract
With the trend towards further minimization, VLSI chips containing random logic will approach various fundamental limits. The interdependency of geometrical, thermal, and electrical effects is discussed, showing that a 1 cm/SUP 2/ chip is about equally limited by these three effects.
Keywords
Integrated circuit technology; Integrated logic circuits; Large scale integration; integrated circuit technology; integrated logic circuits; large scale integration; Charge coupled devices; Fabrication; Logic circuits; MOSFETs; Silicon; Solid state circuits; Spectral analysis; Transversal filters; Very large scale integration; Wiring;
fLanguage
English
Journal_Title
Solid-State Circuits, IEEE Journal of
Publisher
ieee
ISSN
0018-9200
Type
jour
DOI
10.1109/JSSC.1981.1051536
Filename
1051536
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