Title :
Sputter-deposited erbium-doped Y2O3 active optical waveguides
Author :
Hoekstra, T.H. ; Lambeck, P.V. ; Albers, H. ; Popma, T.J.A.
Author_Institution :
Mesa Res. Inst., Enschee, Netherlands
fDate :
4/1/1993 12:00:00 AM
Abstract :
A signal enhancement of 10 dB at 1535 nm with a low launched pump power of 1 mW at 1480 nm is achieved for sputtered Er3+:Y2O3 channel waveguides on oxidised silicon substrates. With the developed reactive co-sputtering process using sputterguns the erbium concentration can be varied easily and reproducibly.
Keywords :
erbium; integrated optics; optical pumping; optical waveguides; optical workshop techniques; solid lasers; sputter deposition; sputtered coatings; yttrium compounds; 1 mW; 1480 nm; 1535 nm; Si; Y 2O 3:Er 3+-SiO 2-Si; active optical waveguides; low launched pump power; reactive co-sputtering process; signal enhancement; sputterguns;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19930390
