Title :
Low-noise automated measurement system for low-frequency current fluctuations in thin-oxide silicon structures
Author :
Saletti, Roberto ; Neri, Bruno
Author_Institution :
Centro di Studio per Metodi e Dispositivi per Radiotransmissioni, Consiglio Nazionale delle Richerche, Pisa, Italy
fDate :
2/1/1992 12:00:00 AM
Abstract :
The design of an automated system for low-noise measurement of low-frequency current fluctuations in thin-oxide silicon devices is presented. The aim of these measurements is to study the current tunneling through the oxide, and to investigate its correlations with the oxide breakdown. The dedicated system is realized by integrating a personal computer commercial acquisition board with custom designed low-noise preamplifiers
Keywords :
computerised instrumentation; electric breakdown of solids; electric noise measurement; fluctuations; insulating thin films; metal-insulator-semiconductor structures; microcomputer applications; silicon compounds; tunnelling; 10 nm; MOS structure; SiO2 film; acquisition board; automated system; correlations; current tunneling; custom designed low-noise preamplifiers; low-frequency current fluctuations; low-noise measurement; oxide breakdown; personal computer; Breakdown voltage; Current measurement; Dielectric breakdown; Electric breakdown; Fluctuations; Microcomputers; Sampling methods; Silicon devices; Stress; Tunneling;
Journal_Title :
Instrumentation and Measurement, IEEE Transactions on
